Triangle Transducer for Micro Electro Mechanical Systems (MEMS) Simulation in ANSYS Finite Element Program

نویسندگان

  • Miklos Gyimesi
  • Ilya Avdeev
چکیده

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

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تاریخ انتشار 2002